So how small are individual components (e.g., transistors) nowadays? Presumably there's a lower limit: once you're a few atoms across, it seems that you can't go any smaller (?).

This video is a really cool dive into EUV for the uninitiated (me) https://youtu.be/MiUHjLxm3V0?si=kEPSicC2WXYhcQ6L

This is a step increase of power to get out of a vacuum system that is highly sensitive to temperature changes.

Or 50% less if China fnally snatches its eastern Fujian province.

You lefties looooove government action, you will love that too. All hail big government!